- AIR SHOWER - CLEAN BENCH - CLEAN BOOTH - FAN FILTER UNIT(ICR용) - FAN FILTER UNIT(BCR용) - CLEAN LOCKER - RELIEF DAMPER - PASS BOX - HEPA FILTER BOX - BLOWER FILTER UNIT - RI UNIT    - CARBON FILTER CHAMBER   - CLEAN PACKAGED UNIT    - PASS BOX(AIR SHOWER, AIR CURTAIN)   BLOWER FILTER UNIT HEPA FILTER BOX에 소형 BLOWER가 부착되어 있다. 저소음, 저진동이 장점이며, 덕트 연결 방식과 자체 순환 방식이 있다.   Type BFU-1 Filtering 0.3㎛ Efficiency DOP 99.97% Filter HEPA Filter AirVolume 약 30CCM Body Baked Melamine Coated Power 3§ 220/380V*60Hz Power Consumption 0.4Kw Weight 약 180kg Type BFU-2 Filtering 0.3㎛ Efficiency DOP 99.97% Filter HEPA Filter AirVolume 약 50CCM Body Baked Melamine Coated Power 3§ 220/380V*60Hz Power Consumption 0.7Kw Weight 약 180kg